{"id":7568,"date":"2025-07-21T14:18:53","date_gmt":"2025-07-21T06:18:53","guid":{"rendered":"http:\/\/surfacility.cn\/?p=7568"},"modified":"2025-07-21T14:28:22","modified_gmt":"2025-07-21T06:28:22","slug":"pvt%e6%b3%95%e5%8d%95%e6%99%b6%e7%a2%b3%e5%8c%96%e7%a1%85%e7%9a%84%e5%88%b6%e5%a4%87","status":"publish","type":"post","link":"http:\/\/www.surfacility.cn\/?p=7568","title":{"rendered":"PVT\u6cd5\u5355\u6676\u78b3\u5316\u7845\u7684\u5236\u5907"},"content":{"rendered":"<p>\u59d3\u540d\uff1a\u5b59\u5609\u7426<\/p>\n<p>&nbsp;<\/p>\n<p><strong><b>\u6458 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76d1\u63a7\u7b49\u6781\u7aef\u73af\u5883\u4e2d\u7684\u4f20\u611f\u5668\u6280\u672f\u4e2d\u5f97\u5230\u4e86\u5e7f\u6cdb\u5e94\u7528\u3002\u6240\u4ee5\u9ad8\u8d28\u91cf\u78b3\u5316\u7845\u5355\u6676\u5728\u9ad8\u529f\u7387\u7535\u5b50\u5668\u4ef6\u3001\u5149\u7535\u5668\u4ef6\u548c\u5176\u4ed6\u9ad8\u6e29\u5e94\u7528\u9886\u57df\u5177\u6709\u5e7f\u6cdb\u7684\u5e94\u7528\u5e76\u5177\u6709\u5e7f\u9614\u7684\u53d1\u5c55\u524d\u666f\u3002<\/p>\n<p>&nbsp;<\/p>\n<p><b><\/b><strong><b>\u4e8c\u3001\u78b3\u5316\u7845\u7b80\u4ecb<\/b><\/strong><\/p>\n<p>\u78b3\u5316\u7845\uff08SiC\uff09\u662f\u4e00\u79cd\u7531\u78b3\u5143\u7d20\u548c\u7845\u5143\u7d20\u7ec4\u6210\u7684\u5316\u5408\u7269\u534a\u5bfc\u4f53\uff0c\u5982\u56fe1\u6240\u793a\uff0c\u78b3\u539f\u5b50\u548c\u7845\u539f\u5b50\u4ee5Si- C\u53cc\u539f\u5b50\u5c42\u7684\u5f62\u5f0f\u7ec4\u6210\u5171\u4ef7\u56db\u9762\u4f53\u7ed3\u6784<sup>[5]<\/sup>\u3002SiC\u5b9e\u9645\u6676\u4f53\u7ed3\u6784\u8d85\u8fc7 200 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aligncenter\" src=\"http:\/\/surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72471.png\" alt=\"\" width=\"309\" height=\"254\" srcset=\"http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72471.png 404w, http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72471-300x247.png 300w\" sizes=\"auto, (max-width: 309px) 100vw, 309px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe1\u00a0\u00a0SiC\u56db\u9762\u4f53\u7ed3\u6784<sup>[5] \u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0\u00a0<\/sup><\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-7571 aligncenter\" src=\"http:\/\/surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72472.png\" alt=\"\" width=\"418\" height=\"309\" srcset=\"http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72472.png 632w, http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72472-300x222.png 300w\" sizes=\"auto, (max-width: 418px) 100vw, 418px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe2 \u00a0SiC\u4e09\u79cd\u4e0d\u540c\u7684\u5806\u579b\u5e8f\u5217<sup>[6]<\/sup><\/p>\n<p>&nbsp;<\/p>\n<p>\u4f46\u662f\u8981\u5145\u5206\u5b9e\u73b0\u4ee5SiC\u4e3a\u886c\u5e95\u7684\u5668\u4ef6\u7684\u4f18\u5f02\u6027\u80fd\uff0c\u9ad8\u8d28\u91cf\u5355\u6676SiC\u7684\u751f\u957f\u4e0e\u6676\u7247\u7684\u52a0\u5de5\u6280\u672f\u662f\u5173\u952e\u3002\u78b3\u5316\u7845\u7684\u5236\u5907\u65b9\u6cd5\u591a\u79cd\u591a\u6837\uff0c\u4e3b\u8981\u6709\u7269\u7406\u6c14\u76f8\u4f20\u8f93\u6cd5\uff08PVT\uff09\u3001\u9ad8\u6e29\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08HTCVD\uff09\u548c\u6db2\u76f8\u6cd5\uff08LPE\u6cd5\uff09\u7b49<sup>[11]<\/sup>\u3002\u5176\u4e2d\uff0c\u7269\u7406\u6c14\u76f8\u4f20\u8f93\u6cd5\uff08PVT\uff09\u662f\u6700\u5e38\u7528\u7684\u5355\u6676\u78b3\u5316\u7845\u5236\u5907\u6280\u672f\u4e4b\u4e00\uff0c\u7279\u522b\u9002\u7528\u4e8e\u5236\u5907\u8f83\u9ad8\u8d28\u91cf\u7684\u5927\u5c3a\u5bf8\u5355\u6676SiC<sup>[12]<\/sup>\u3002PVT\u6cd5\u5177\u6709\u5de5\u827a\u76f8\u5bf9\u7b80\u5355\u3001\u6210\u672c\u8f83\u4f4e\u3001\u9002\u5408\u5927\u89c4\u6a21\u751f\u4ea7\u7b49\u4f18\u70b9\uff0c\u5df2\u5f97\u5230\u5e7f\u6cdb\u7684\u4ea7\u4e1a\u5316\u5e94\u7528\uff0c\u5728SiC\u6750\u6599\u5236\u5907\u7814\u7a76\u4e2d\u5360\u6709\u91cd\u8981\u5730\u4f4d<sup>[<\/sup><sup>13<\/sup><sup>]<\/sup>\u3002<\/p>\n<p><strong><b>\u4e09\u3001<\/b><\/strong><strong><b>PVT<\/b><\/strong><strong><b>\u6cd5\u5236\u5907\u78b3\u5316\u7845\u7684\u57fa\u672c\u539f\u7406<\/b><\/strong><\/p>\n<p>PVT\u6cd5\u5236\u5907SiC\u57fa\u4e8e\u9ad8\u6e29\u4e0b\u78b3\u5316\u7845\u7684\u5347\u534e\u548c\u518d\u7ed3\u6676\u8fc7\u7a0b<sup>[<\/sup><sup>14<\/sup><sup>]<\/sup>\uff0c\u5176\u4e3b\u8981\u88c5\u7f6e\u7ed3\u6784\u5982\u56fe3\u6240\u793a\uff0c\u7531\u77f3\u58a8\u5769\u57da\u3001SiC\u7c89\u6e90\u3001\u7c7d\u6676\u3001\u611f\u5e94\u7ebf\u5708\u548c\u4fdd\u6e29\u5c42\u7ec4\u6210<sup>[15]<\/sup>\u3002<\/p>\n<p>&nbsp;<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-7572 aligncenter\" src=\"http:\/\/surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72473.png\" alt=\"\" width=\"521\" height=\"370\" srcset=\"http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72473.png 1029w, http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72473-300x213.png 300w, http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72473-1024x727.png 1024w, http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72473-768x546.png 768w\" sizes=\"auto, (max-width: 521px) 100vw, 521px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe3 \u00a0PVT\u6cd5\u751f\u957fSiC\u5355\u6676\u88c5\u7f6e\u7ed3\u6784\u793a\u610f\u56fe<sup>[15]<\/sup><\/p>\n<p><sup>\u00a0<\/sup><\/p>\n<p>\u901a\u5e38\u5c06SiC\u7c89\u6599\u7f6e\u4e8e\u9ad8\u6e29\u77f3\u58a8\u5769\u57da\u5185\uff0c\u5728\u611f\u5e94\u7ebf\u5708\u7684\u6da1\u6d41\u52a0\u70ed\u4f5c\u7528\u4e0b\uff0c2000-3000\u2103\u7684\u4f4e\u538b\u9ad8\u6e29\u60f0\u6027\u6c14\u6c1b\u4e2d\uff0c\u78b3\u5316\u7845\u7c89\u6599\u53d7\u70ed\u5206\u89e3\u6210\u6c14\u6001\u7845\u548c\u78b3\u7684\u5316\u5408\u7269\uff08\u5982Si\u3001Si\u2082C\u3001SiC\u2082\u7b49\uff09\u3002\u6240\u751f\u6210\u7684\u6c14\u76f8\u7269\u8d28\u5728\u6d53\u5ea6\u68af\u5ea6\u4e0e\u538b\u529b\u68af\u5ea6\u7684\u5171\u540c\u4f5c\u7528\u4e0b\u5411\u4f4e\u6e29\u7684\u7c7d\u6676\u533a\u57df\u6d41\u52a8\u3002\u5728\u6d41\u52a8\u8fc7\u7a0b\u4e2d\uff0c\u7531\u4e8e\u6e29\u5ea6\u9010\u6e10\u964d\u4f4e\uff0c\u6c14\u76f8\u7269\u8d28\u9010\u6e10\u504f\u79bb\u5316\u5b66\u5e73\u8861\u5e76\u53d8\u5f97\u8fc7\u9971\u548c\uff0c\u8fdb\u800c\u4ee5\u56fa\u5b9a\u5728\u5769\u57da\u9876\u90e8\u7684\u7c7d\u6676\u4e3a\u5f62\u6838\u4e2d\u5fc3\u53d1\u751f\u91cd\u7ed3\u6676\uff0c\u5f62\u6210\u78b3\u5316\u7845\u6676\u4f53<sup>[<\/sup><sup>16<\/sup><sup>]<\/sup>\u3002\u8be5\u8fc7\u7a0b\u53ef\u4ee5\u6982\u62ec\u4e3a\u4e09\u4e2a\u9636\u6bb5\uff1a<\/p>\n<p>\uff081\uff09\u5347\u534e\u9636\u6bb5\uff1aSiC\u6e90\u6750\u6599\u5728\u9ad8\u6e29\u4e0b\u53d1\u751f\u5347\u534e\uff0c\u5f62\u6210\u6c14\u6001\u7684Si\u548cC\u5316\u5408\u7269\u3002<\/p>\n<p>\uff082\uff09\u6c14\u76f8\u4f20\u8f93\u9636\u6bb5\uff1a\u5347\u534e\u7684\u6c14\u6001\u5206\u5b50\u901a\u8fc7\u8f7d\u6c14\uff08\u901a\u5e38\u4e3a\u6c29\u6c14\uff09\u4ece\u9ad8\u6e29\u533a\u4f20\u8f93\u81f3\u8f83\u4f4e\u6e29\u7684\u886c\u5e95\u8868\u9762\u3002<\/p>\n<p>\uff083\uff09\u6c89\u79ef\u548c\u6676\u4f53\u751f\u957f\u9636\u6bb5\uff1a\u6c14\u6001\u7269\u8d28\u5728\u886c\u5e95\u8868\u9762\u51b7\u51dd\u5e76\u53cd\u5e94\uff0c\u91cd\u65b0\u5f62\u6210\u56fa\u6001\u7684SiC\u6676\u4f53\u3002<\/p>\n<p>\u76ee\u524d\u4f7f\u7528\u5229\u7528 PVT \u6cd5\u751f\u957f\u78b3\u5316\u7845\u6676\u4f53\u7684\u901f\u7387\u6700\u9ad8\u53ef\u8fbe1-2 mm\/h<sup>[1<\/sup><sup>7<\/sup><sup>]<\/sup>\u3002PVT\u6cd5\u901a\u8fc7\u63a7\u5236\u6e29\u5ea6\u68af\u5ea6\u3001\u6c14\u6c1b\u548c\u538b\u5f3a\u7b49\u6761\u4ef6\uff0c\u80fd\u591f\u63a7\u5236SiC\u6676\u4f53\u7684\u751f\u957f\u901f\u7387\u3001\u6676\u4f53\u8d28\u91cf\u53ca\u5c3a\u5bf8\u3002<\/p>\n<p><strong><b>\u56db\u3001<\/b><\/strong><strong><b>PVT<\/b><\/strong><strong><b>\u6cd5\u5236\u5907\u78b3\u5316\u7845\u7684\u5de5\u827a\u5f71\u54cd\u56e0\u7d20<\/b><\/strong><\/p>\n<p>\uff081\uff09\u6e29\u5ea6\u5206\u5e03<\/p>\n<p>\u76ee\u524d\u5927\u89c4\u6a21\u4ea7\u4e1a\u5316\u7684\u7269\u7406\u6c14\u76f8\u4f20\u8f93\u6cd5\uff0c\u4ee5\u4e2d\u9891\u611f\u5e94\u7ebf\u5708\u4e3a\u52a0\u70ed\u7535\u6e90\uff0c\u5728\u6da1\u6d41\u4f5c\u7528\u4e0b\u9ad8\u5bc6\u5ea6\u77f3\u58a8\u53d1\u70ed\u4f53\u5c06\u88ab\u52a0\u70ed\u3002\u5c06SiC\u7c89\u4f53\u586b\u6ee1\u77f3\u58a8\u5769\u57da\u7684\u5e95\u90e8\uff0cSiC\u7c7d\u6676\u7c98\u7ed3\u5728\u8ddd\u539f\u6599\u9762\u6709\u4e00\u5b9a\u8ddd\u79bb\u7684\u77f3\u58a8\u5769\u57da\u76d6\u5185\u90e8\uff0c\u7136\u540e\u5c06\u77f3\u58a8\u5769\u57da\u6574\u4f53\u7f6e\u4e8e\u77f3\u58a8\u53d1\u70ed\u4f53\u4e2d\uff0c\u901a\u8fc7\u8c03\u8282\u5916\u90e8\u77f3\u58a8\u6be1\u7684\u6e29\u5ea6\uff0c\u4f7fSiC\u7684\u539f\u6599\u7f6e\u4e8e\u9ad8\u6e29\u533a\uff0c\u800cSiC\u7c7d\u6676\u76f8\u5e94\u7684\u5904\u4e8e\u4f4e\u6e29\u533a\u3002\u5728\u8d85\u8fc72000\u2103\u9ad8\u6e29\u4e0b\uff0c\u78b3\u5316\u7845\u539f\u6599\u5206\u89e3\u6210\u5347\u534e\u7684Si\u539f\u5b50\u3001SiC<sub>2<\/sub>\u5206\u5b50\u4ee5\u53caSi<sub>2<\/sub>C\u5206\u5b50\u7b49\u6c14\u76f8\u7269\u8d28\uff0c\u6c14\u76f8\u7269\u8d28\u5728\u6e29\u5ea6\u68af\u5ea6\u7684\u9a71\u52a8\u4e0b\u5411\u4f4e\u6e29\u533a\u8f93\u9001\uff0c\u5728SiC\u7c7d\u6676\u7684C\u9762\u4e0a\u751f\u957f\u6210SiC\u6676\u4f53\u3002\u901a\u5e38\uff0c\u9ad8\u6e29\u533a\u7684SiC\u6e90\u6750\u6599\u6e29\u5ea6\u57282000\u2103\u4ee5\u4e0a\uff0c\u800c\u886c\u5e95\u533a\u7684\u6e29\u5ea6\u76f8\u5bf9\u8f83\u4f4e\uff0c\u5f62\u6210\u7684\u6e29\u5ea6\u68af\u5ea6\u9a71\u52a8\u6c14\u76f8\u4f20\u8f93\u3002\u6e29\u5ea6\u68af\u5ea6\u8fc7\u5927\u53ef\u80fd\u5bfc\u81f4\u6676\u4f53\u5185\u4ea7\u751f\u7f3a\u9677\u6216\u88c2\u7eb9\uff0c\u800c\u68af\u5ea6\u8fc7\u5c0f\u5219\u4f1a\u964d\u4f4e\u751f\u957f\u901f\u7387\u3002\u5982\u56fe4\u6240\u793a\uff0cSiC\u6676\u578b\u5728\u4e0d\u540c\u6e29\u5ea6\u4e0b\u6709\u4e0d\u540c\u7684\u76f8\u5bf9\u5360\u6bd4\uff0c\u5e76\u4e14\u53ef\u4ee5\u5728\u4e00\u5b9a\u6e29\u5ea6\u4e0b\u76f8\u4e92\u8f6c\u5316<sup>[18]<\/sup>\u3002\u56e0\u6b64\uff0cPVT\u6cd5\u7684SiC\u6676\u4f53\u751f\u957f\u8fc7\u7a0b\u4f9d\u8d56\u4e8e\u7089\u8154\u5185\u7684\u6e29\u5ea6\u5206\u5e03\u3002\u674e\u9e4f\u7a0b\u3001\u9648\u5f66\u5b87\u3001\u9773\u4e3d\u5ca9\u7b49\u4eba\u5747\u5bf9PVT\u8bbe\u5907\u4e2d\u7684\u6e29\u5ea6\u5206\u5e03\u8fdb\u884c\u4e86\u4f18\u5316\u7814\u7a76\uff0c\u901a\u8fc7\u8c03\u6574\u7ebf\u5708\u4f4d\u7f6e\u9ad8\u5ea6\u3001\u5769\u57da\u65cb\u8f6c\u901f\u7387\u3001\u52a0\u70ed\u529f\u7387\u3001\u8154\u4f53\u5f62\u72b6\u548c\u4fdd\u6e29\u5c42\u8bbe\u8ba1\u7b49\u6765\u4f18\u5316\u8154\u4f53\u5185\u7684\u6e29\u5ea6\u5206\u5e03<sup>[19-21]<\/sup>\uff0c\u8fdb\u800c\u51cf\u5c11\u5fae\u7ba1\u3001\u4f4d\u9519\u7b49\u7f3a\u9677\uff0c\u63d0\u9ad8SiC\u7684\u5c3a\u5bf8\u4e0e\u54c1\u8d28\u3002<\/p>\n<p>&nbsp;<\/p>\n<p><img loading=\"lazy\" decoding=\"async\" class=\"alignnone wp-image-7573 aligncenter\" src=\"http:\/\/surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72474.png\" alt=\"\" width=\"678\" height=\"357\" srcset=\"http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72474.png 1180w, http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72474-300x158.png 300w, http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72474-1024x539.png 1024w, http:\/\/www.surfacility.cn\/wp-content\/uploads\/2025\/07\/\u56fe\u72474-768x404.png 768w\" sizes=\"auto, (max-width: 678px) 100vw, 678px\" \/><\/p>\n<p style=\"text-align: center;\">\u56fe4 \u00a0PVT\u6cd5\u751f\u957fSiC\u6676\u578b\u4e0e\u6e29\u5ea6\u7684\u5173\u7cfb<sup>[18]<\/sup><\/p>\n<p>\uff082\uff09\u6c14\u6c1b\u63a7\u5236<\/p>\n<p>\u6c14\u76f8\u4f20\u8f93\u7684\u6c14\u6c1b\u901a\u5e38\u91c7\u7528\u60f0\u6027\u6c14\u4f53\u5982\u6c29\u6c14\u3002\u9002\u5f53\u7684\u6c14\u4f53\u6d41\u91cf\u548c\u538b\u529b\u53ef\u4ee5\u4fc3\u8fdbSiC\u5206\u5b50\u7684\u4f20\u8f93\u548c\u6c89\u79ef\u3002\u6c14\u6c1b\u4e2d\u7684\u5fae\u91cf\u6742\u8d28\uff08\u5982\u6c27\u6216\u6c2e\uff09\u53ef\u80fd\u4e0eSiC\u53d1\u751f\u53cd\u5e94\uff0c\u5f62\u6210\u671f\u671b\u5916\u7684\u5316\u5408\u7269\uff0c\u4ece\u800c\u5f71\u54cd\u6676\u4f53\u8d28\u91cf<sup>[22]<\/sup>\u3002\u90ed\u91d1\u7b1b\u5c31\u901a\u8fc7\u63ba\u6742\u6c2e\u6c14\u8c03\u8282\u751f\u6210\u7684SiC\u7684\u786c\u5ea6<sup>[23]<\/sup>\u3002\u800cYANG YING\u5728\u91c7\u7528 PVT\u6cd5\u751f\u957fSiC\u65f6\uff0c\u5219\u901a\u8fc7\u66f4\u7cbe\u786e\u5730\u63a7\u5236\u6c14\u6c1b\uff0c\u589e\u52a0\u751f\u957f\u6c14\u4f53\u6d41\u91cf\uff0c\u907f\u514dN2\u7684\u63ba\u6742\uff0c\u4f7f\u5203\u4f4d\u9519\uff08TED\uff09\u5bc6\u5ea6\u4e0b\u964d<sup>[24]<\/sup>\uff0c\u63d0\u9ad8\u4e86\u5355\u6676SiC\u7684\u8d28\u91cf\u3002\u56e0\u6b64\uff0c\u4e25\u683c\u63a7\u5236\u6c14\u6c1b\u7684\u7eaf\u51c0\u5ea6\u81f3\u5173\u91cd\u8981\u3002<\/p>\n<p>\uff083\uff09\u7c89\u4f53\u7eaf\u5ea6<\/p>\n<p>SiC\u7c89\u4f53\u4f5c\u4e3a\u5408\u6210\u539f\u6599\u4f1a\u76f4\u63a5\u5f71\u54cdSiC\u5355\u6676\u7684\u751f\u957f\u8d28\u91cf\u548c\u7535\u5b66\u6027\u8d28\u3002\u9648\u4e4b\u6218\u7b49\u7814\u7a76\u4e86SiC\u7c89\u4f53\u5728\u751f\u957f\u8fc7\u7a0b\u4e2d\u7684\u7269\u76f8\u53d8\u5316\u53ca\u5bf9\u5355\u6676\u5747\u5300\u6027\u3001\u7f3a\u9677\u7b49\u7684\u5f71\u54cd\uff0c\u53d1\u73b0\u5728\u4f7f\u7528\u03b2-SiC\u7c89\u4f53\u751f\u957fSiC\u5355\u6676\u65f6\uff0c\u5728\u6676\u4f53\u751f\u957f\u8fc7\u7a0b\u4e2d\u5b58\u5728\u7740\u5411\u03b1-SiC\u7684\u76f8\u8f6c\u53d8\uff0c\u9020\u6210\u6c14\u76f8\u7ec4\u5206\u4e2d\u7684Si \/ C\u6469\u5c14\u6bd4\u53d8\u5316\u8f83\u5927\uff0c\u5bf9\u6676\u4f53\u751f\u957f\u4ea7\u751f\u4e0d\u5229\u5f71\u54cd\u3002\u4e3a\u4e86\u63d0\u9ad8\u6676\u4f53\u5747\u5300\u6027\uff0c\u964d\u4f4e\u5fae\u7ba1\u7b49\u7f3a\u9677\uff0c\u5fc5\u987b\u5bf9\u539f\u6599\u8fdb\u884c\u9884\u70e7\u5904\u7406\uff0c\u4e00\u65b9\u9762\u4fc3\u4f7f\u5176\u6676\u578b\u8f6c\u53d8\u5e76\u589e\u5927\u7c89\u4f53\u9897\u7c92\u5ea6\uff0c\u53e6\u4e00\u65b9\u9762\u964d\u4f4e\u539f\u6599\u7684\u6742\u8d28\u542b\u91cf<sup>[25]<\/sup>\u3002Shin\u7b49\u7814\u7a76\u4e86\u4e0d\u540c\u7c92\u5f84\u4ee5\u53ca\u4e0d\u540c\u6742\u8d28\u542b\u91cf\u7684SiC\u7c89\u4f53\u5bf9SiC\u5355\u6676\u751f\u957f\u7684\u5f71\u54cd\uff0c\u53d1\u73b0\u5355\u6676\u4e2d\u5927\u90e8\u5206\u7684\u6742\u8d28\u5747\u6765\u81eaSiC\u7c89\u4f53\uff0c\u5355\u6676\u7684\u8d28\u91cf\u4e0e\u7c89\u4f53\u7684\u7eaf\u5ea6\u5448\u7ebf\u6027\u5173\u7cfb\u3002\u9ad8\u7eaf\u5ea6\u7c89\u4f53\u5bf9\u4e8e\u51cf\u5c114H-SiC\u4e2d\u57fa\u5e73\u9762\u4f4d\u9519\uff08BPD\uff09\u7684\u5bc6\u5ea6\u662f\u6709\u5229\u7684<sup>[26]<\/sup>\u3002\u738b\u6bbf\u3001\u80e1\u667a\u81e3\u3001\u9ad8\u6500\u3001\u674e\u658c\u3001\u9a6c\u5eb7\u592b\u7b49\u4eba\u901a\u8fc7\u6539\u8fdb\u5236\u5907SiC\u7c89\u4f53\u7684\u5de5\u827a\u4ee5\u53ca\u76f8\u5173\u53c2\u6570\u5982\u6e29\u5ea6\u3001\u6c14\u6c1b\u7b49\u83b7\u5f97\u4e86\u8f83\u9ad8\u7eaf\u5ea6\u7684\u78b3\u5316\u7845\u7c89\u6599<sup>[27-31]<\/sup>\uff0c\u4e3a\u540e\u7eed\u751f\u957f\u5927\u5c3a\u5bf8\u3001\u4f4e\u7f3a\u9677\u5bc6\u5ea6\u7684\u9ad8\u54c1\u8d28\u5355\u6676SiC\u6253\u4e0b\u4e86\u91cd\u8981\u7684\u57fa\u7840\u3002<\/p>\n<p>\uff084\uff09\u8154\u4f53\u5185\u7684\u538b\u5f3a<\/p>\n<p>\u7cfb\u7edf\u7684\u5de5\u4f5c\u538b\u529b\u5bf9\u5347\u534e\u8fc7\u7a0b\u548c\u6c14\u76f8\u4f20\u8f93\u8fc7\u7a0b\u6709\u76f4\u63a5\u5f71\u54cd\u3002\u9ad8\u771f\u7a7a\u5c11\u6742\u8d28\uff0c\u8f83\u4f4e\u7684\u538b\u529b\u6709\u52a9\u4e8e\u589e\u52a0SiC\u7684\u5347\u534e\u901f\u7387\uff1b\u4f46\u8fc7\u4f4e\u7684\u538b\u529b\u53ef\u80fd\u4f1a\u5bfc\u81f4\u5347\u534e\u7269\u8d28\u5728\u4f20\u8f93\u8fc7\u7a0b\u4e2d\u635f\u5931\uff0c\u5f71\u54cd\u6676\u4f53\u751f\u957f\u901f\u7387\u3002\u4e00\u822c\u538b\u529b\u8303\u56f4\u4e3a1-100\u6258\uff0c\u9700\u6839\u636e\u5177\u4f53\u7684\u751f\u957f\u76ee\u6807\u8fdb\u884c\u4f18\u5316\uff0c\u76ee\u524d\u8be5\u65b9\u9762\u7684\u7814\u7a76\u8f83\u5c11\u3002<\/p>\n<p>\uff085\uff09\u751f\u957f\u65f6\u95f4<\/p>\n<p>PVT\u6cd5\u901a\u5e38\u662f\u4e00\u4e2a\u957f\u65f6\u95f4\u7684\u6676\u4f53\u751f\u957f\u8fc7\u7a0b\uff0c\u751f\u957f\u65f6\u95f4\u901a\u5e38\u5728\u51e0\u5341\u5c0f\u65f6\u5230\u4e0a\u767e\u5c0f\u65f6\u4e0d\u7b49\u3002\u5ef6\u957f\u751f\u957f\u65f6\u95f4\u53ef\u4ee5\u589e\u52a0\u6676\u4f53\u7684\u539a\u5ea6\uff0c\u4f46\u540c\u65f6\u4e5f\u4f1a\u589e\u52a0\u70ed\u5e94\u529b\u548c\u7f3a\u9677\u751f\u6210\u7684\u98ce\u9669<sup>[32]<\/sup>\u3002\u56e0\u6b64\uff0c\u5408\u7406\u7684\u751f\u957f\u65f6\u95f4\u63a7\u5236\u662f\u4fdd\u8bc1\u6676\u4f53\u8d28\u91cf\u7684\u5173\u952e\u3002<\/p>\n<p><strong><b>\u4e94\u3001<\/b><\/strong><strong><b>PVT<\/b><\/strong><strong><b>\u6cd5\u5236\u5907\u78b3\u5316\u7845\u7684\u7ed3\u6784\u4e0e\u6027\u80fd<\/b><\/strong><\/p>\n<p>\u901a\u8fc7\u4f18\u5316PVT\u6cd5\u7684\u5de5\u827a\u53c2\u6570\uff0c\u53ef\u4ee5\u5236\u5907\u51fa\u4e0d\u540c\u6676\u578b\u7684SiC\u5355\u6676\uff0c\u4e3b\u8981\u5305\u62ec3C-SiC\u30014H-SiC\u548c6H-SiC\u4e09\u79cd\u6676\u578b\u3002\u8fd9\u4e9b\u6676\u578b\u7684\u7ed3\u6784\u548c\u6027\u80fd\u5dee\u5f02\u4f7f\u5176\u9002\u7528\u4e8e\u4e0d\u540c\u7684\u5e94\u7528\u9886\u57df\u3002<\/p>\n<p>3C-SiC\u662fSiC\u4e2d\u7684\u4e00\u79cd\u7acb\u65b9\u6676\u578b\u7ed3\u6784\uff0c\u5e26\u9699\u8f83\u5c0f\uff08\u7ea62.3 eV\uff09\uff0c\u7535\u5b50\u8fc1\u79fb\u7387\u8f83\u9ad8\uff0c\u9002\u7528\u4e8e\u9ad8\u9891\u7535\u5b50\u5668\u4ef6\u3002\u7136\u800c\uff0c3C-SiC\u6676\u4f53\u7684\u5236\u5907\u96be\u5ea6\u8f83\u5927\uff0c\u5bb9\u6613\u4ea7\u751f\u7f3a\u9677\uff0c\u9650\u5236\u4e86\u5176\u5e94\u7528\u3002\u800c4H-SiC\u662f\u76ee\u524d\u7814\u7a76\u548c\u5e94\u7528\u6700\u4e3a\u5e7f\u6cdb\u7684SiC\u6676\u578b<sup>[33-36<\/sup><sup>]<\/sup>\uff0c\u5177\u6709\u8f83\u5927\u7684\u5e26\u9699\uff08\u7ea63.3 eV\uff09\u548c\u8f83\u9ad8\u7684\u51fb\u7a7f\u573a\u5f3a\uff0c\u9002\u7528\u4e8e\u9ad8\u529f\u7387\u3001\u9ad8\u6e29\u7535\u5b50\u5668\u4ef6\u3002\u56e0\u4e3a4H-SiC\u6676\u4f53\u751f\u957f\u7684\u7a33\u5b9a\u6027\u8f83\u597d\uff0c\u7f3a\u9677\u8f83\u5c11\uff0c\u662f\u529f\u7387\u534a\u5bfc\u4f53\u5668\u4ef6\u7684\u9996\u9009\u6750\u6599\u30026H-SiC\u4e5f\u662f\u4e00\u79cd\u5e38\u89c1\u7684SiC\u591a\u578b\u7ed3\u6784\uff0c\u5e26\u9699\u7ea6\u4e3a3.0 eV\uff0c\u7535\u5b50\u8fc1\u79fb\u7387\u7a0d\u4f4e\u4e8e4H-SiC\uff0c\u4f46\u5176\u751f\u957f\u6280\u672f\u8f83\u6210\u719f\uff0c\u6676\u4f53\u8d28\u91cf\u9ad8\uff0c\u5e7f\u6cdb\u5e94\u7528\u4e8e\u5149\u7535\u5668\u4ef6\u548c\u7535\u5b50\u5668\u4ef6\u4e2d\u3002<\/p>\n<p><strong><b>\u516d\u3001<\/b><\/strong><strong><b>PVT<\/b><\/strong><strong><b>\u6cd5<\/b><\/strong><strong><b>\u5236\u5907<\/b><\/strong><strong><b>SiC<\/b><\/strong><strong><b>\u9762\u4e34\u7684\u56f0\u96be<\/b><\/strong><strong><b>\u4e0e\u6311\u6218<\/b><\/strong><\/p>\n<p>\u5c3d\u7ba1PVT\u6cd5\u5728\u5236\u5907\u9ad8\u8d28\u91cf\u78b3\u5316\u7845\u5355\u6676\u65b9\u9762\u53d6\u5f97\u4e86\u663e\u8457\u8fdb\u5c55\uff0c\u4f46\u4ecd\u5b58\u5728\u4e00\u4e9b\u6280\u672f\u6311\u6218\u9700\u8981\u514b\u670d\uff0c\u4ee5\u8fdb\u4e00\u6b65\u63a8\u52a8\u5176\u5e94\u7528\u3002<\/p>\n<p>\u9996\u5148\u662f\u6676\u4f53\u7f3a\u9677\u63a7\u5236\u3002\u5c3d\u7ba1PVT\u6cd5\u80fd\u591f\u5236\u5907\u51fa\u8f83\u5927\u5c3a\u5bf8\u7684SiC\u5355\u6676\uff0c\u4f46\u5f53\u5c3a\u5bf8\u6269\u5c55\u5230 8 \u82f1\u5bf8\u65f6, \u70ed\u5e94\u529b\u589e\u5927, \u7f3a\u9677\u63a7\u5236\u66f4\u52a0\u56f0\u96be, \u6676\u4f53\u4e2d\u4ecd\u53ef\u80fd\u51fa\u73b0\u4f4d\u9519\u3001\u5806\u579b\u5c42\u9519\u548c\u7a7a\u4f4d\u7b49\u7f3a\u9677<sup>[10,37]<\/sup>\u3002\u8fd9\u4e9b\u7f3a\u9677\u4f1a\u5f71\u54cd\u5668\u4ef6\u7684\u7535\u5b66\u6027\u80fd\u548c\u7a33\u5b9a\u6027<sup>[38-40]<\/sup>\u3002\u76ee\u524d\u5546\u75286\u82f1\u5bf8\u5bfc\u7535\u578b4H-SiC\u886c\u5e95\u7684TSD\u5bc6\u5ea6\u63a7\u5236\u5728200 cm<sup>&#8211;<\/sup><sup>2<\/sup>\u00a0\u4ee5\u4e0b, \u4f18\u54c1\u7684TSD\/BPD\u5bc6\u5ea6\u5c0f\u4e8e50 cm<sup>-2<\/sup>, BPD \u5bc6\u5ea6\u5728800 cm<sup>-2<\/sup>\u4ee5\u4e0b, \u4f18\u54c1\u7684TSD\/BPD\u5bc6\u5ea6\u5c0f\u4e8e500 cm<sup>-2[41]<\/sup>\u3002\u56e0\u6b64\uff0c\u5982\u4f55\u901a\u8fc7\u4f18\u5316\u5de5\u827a\u6761\u4ef6\u964d\u4f4e\u7f3a\u9677\u5bc6\u5ea6\uff0c\u662f\u5f53\u524d\u7814\u7a76\u7684\u91cd\u70b9\u30022022\u5e74, \u5c71\u4e1c\u5927\u5b66\u4e0e\u5357\u7802\u6676\u5706\u6210\u529f\u5236\u5907\u4e86\u4f4e\u5fae\u7ba1\u5bc6\u5ea6\u9ad8\u7ed3\u6676\u8d28\u91cf\u76848\u82f1\u5bf8\u5bfc\u7535\u578b 4H-SiC \u5355\u6676\u886c, \u8fd1\u671f\u57288\u82f1\u5bf8SiC\u886c\u5e95\u4f4d\u9519\u7f3a\u9677\u63a7\u5236\u65b9\u9762\u53c8\u53d6\u5f97\u4e86\u91cd\u5927\u7a81\u7834, \u5236\u5907\u4e86\u8fd1\u96f6\u87ba\u4f4d\u9519\uff08TSD\uff09\u548c\u4f4e\u57fa\u5e73\u9762\u4f4d\u9519\uff08BPD\uff09\u5bc6\u5ea6\u76848\u82f1\u5bf8\u5bfc\u7535\u578b 4H-SiC \u5355\u6676\u886c\u5e95<sup>[32]<\/sup>\u3002<\/p>\n<p>\u5176\u6b21\u662f\u5e94\u529b\u63a7\u5236\u3002\u5728PVT\u6cd5\u7684\u751f\u957f\u8fc7\u7a0b\u4e2d\uff0cSiC\u5355\u6676\u7531\u4e8e\u6e29\u5ea6\u68af\u5ea6\u548c\u70ed\u81a8\u80c0\u7cfb\u6570\u5dee\u5f02\uff0c\u6613\u4ea7\u751f\u70ed\u5e94\u529b\uff0c\u8fdb\u800c\u5bfc\u81f4\u6676\u4f53\u5f00\u88c2\u6216\u7f3a\u9677\u589e\u52a0<sup>[42,43]<\/sup>\u3002\u5982\u4f55\u6709\u6548\u63a7\u5236\u5e94\u529b\uff0c\u907f\u514d\u6676\u4f53\u5185\u90e8\u88c2\u7eb9\u7684\u5f62\u6210\uff0c\u662f\u63d0\u5347SiC\u6676\u4f53\u8d28\u91cf\u7684\u91cd\u8981\u8bfe\u9898\u3002<\/p>\n<p>\u7136\u540e\u662f\u5927\u5c3a\u5bf8\u5355\u6676SiC\u7684\u5236\u5907\u3002\u968f\u7740SiC\u5728\u7535\u5b50\u5668\u4ef6\u4e2d\u7684\u9700\u6c42\u4e0d\u65ad\u589e\u957f\uff0c\u5236\u5907\u66f4\u5927\u5c3a\u5bf8\uff08\u59828\u82f1\u5bf8\u3001\u751a\u81f312\u82f1\u5bf8\uff09\u4e14\u9ad8\u8d28\u91cf\u7684SiC\u5355\u6676\u6210\u4e3a\u4e00\u5927\u6311\u6218\u3002\u6269\u5927SiC\u886c\u5e95\u5c3a\u5bf8\u662f\u589e\u52a0\u4ea7\u80fd\u4f9b\u7ed9\u3001\u964d\u4f4e\u6210\u672c\u7684\u91cd\u8981\u9014\u5f84\u4e4b\u4e00\u3002\u5f53\u524dPVT\u6cd5\u4e3b\u8981\u80fd\u591f\u7a33\u5b9a\u5236\u59074\u82f1\u5bf8\u548c6\u82f1\u5bf8\u7684SiC\u6676\u7247\uff0c\u8fdb\u4e00\u6b65\u6269\u5927\u6676\u7247\u5c3a\u5bf8\u4ecd\u9700\u89e3\u51b3\u6750\u6599\u5747\u5300\u6027\u548c\u751f\u957f\u901f\u7387\u95ee\u9898\u3002\u76ee\u524d\u56fd\u5185\u5916\u7684\u78b3\u5316\u7845\u5355\u6676\u7684\u76f4\u5f84\u5df2\u7ecf\u666e\u904d\u80fd\u8fbe\u52306\u82f1\u5bf8<sup>[44-46]<\/sup>\uff0c\u4f46\u5176\u539a\u5ea6\u901a\u5e38\u572820~30 mm\u4e4b\u95f4\uff0c\u5bfc\u81f4\u4e00\u4e2a\u78b3\u5316\u7845\u6676\u952d\u5207\u7247\u6240\u83b7\u5f97\u7684\u78b3\u5316\u7845\u886c\u5e95\u7247\u7684\u6570\u91cf\u76f8\u5f53\u6709\u9650\uff0c\u589e\u52a0\u78b3\u5316\u7845\u5355\u6676\u539a\u5ea6\u7684\u4e3b\u8981\u6311\u6218\u5728\u4e8e\u5176\u751f\u957f\u65f6\u539a\u5ea6\u7684\u589e\u52a0\u53ca\u6e90\u7c89\u7684\u6d88\u8017\u5bf9\u751f\u957f\u5ba4\u5185\u90e8\u70ed\u573a\u7684\u6539\u53d8\u3002\u6d59\u6c5f\u5927\u5b66\u676d\u5dde\u56fd\u9645\u79d1\u521b\u4e2d\u5fc3\uff08\u7b80\u79f0\u79d1\u521b\u4e2d\u5fc3\uff09\u5148\u8fdb\u534a\u5bfc\u4f53\u7814\u7a76\u9662-\u4e7e\u6676\u534a\u5bfc\u4f53\u8054\u5408\u5b9e\u9a8c\u5ba4\u901a\u8fc7\u63d0\u62c9\u7c7d\u6676\u53ca\u5df2\u7ecf\u751f\u957f\u7684\u6676\u4f53\uff0c\u4f7f\u6676\u4f53\u751f\u957f\u9762\u59cb\u7ec8\u5904\u4e8e\u4e00\u4e2a\u5408\u9002\u7684\u5f84\u5411\u6e29\u5ea6\u68af\u5ea6\u4e0b\uff0c\u5f62\u6210\u6709\u5229\u4e8e\u964d\u4f4e\u6676\u4f53\u5e94\u529b\u7684\u8868\u9762\u5f62\u6001\u3002\u91c7\u7528\u63d0\u62c9\u5f0f\u7269\u7406\u6c14\u76f8\u4f20\u8f93\u6cd5\uff0c\u8054\u5408\u5b9e\u9a8c\u5ba4\u6210\u529f\u751f\u957f\u51fa\u76f4\u5f84\u4e3a6\u82f1\u5bf8\uff08\u5373150 mm\uff09\u7684\u78b3\u5316\u7845\u5355\u6676\uff0c\u5176\u539a\u5ea6\u7a81\u7834\u4e86100 mm\u3002\u6d4b\u8bd5\u52a0\u5de5\u800c\u5f97\u7684\u886c\u5e95\u7247\u7684\u7ed3\u679c\u663e\u793a\uff0c\u8be5\u8d85\u539a\u78b3\u5316\u7845\u5355\u6676\u5177\u6709\u5355\u4e00\u76844H\u6676\u578b<sup>[47]<\/sup>\u3002\u8be5\u539a\u5ea6\u7684\u5b9e\u73b0\uff0c\u4e00\u65b9\u9762\u8282\u7ea6\u4e86\u6602\u8d35\u7684\u78b3\u5316\u7845\u7c7d\u6676\u7684\u7528\u91cf\uff0c\u53e6\u4e00\u65b9\u9762\u4f7f\u4e00\u4e2a\u78b3\u5316\u7845\u5355\u6676\u952d\u5207\u7247\u6240\u83b7\u5f97\u7684\u78b3\u5316\u7845\u886c\u5e95\u7247\u6570\u91cf\u80fd\u591f\u7ffb\u500d\uff0c\u53ef\u4ee5\u5927\u5e45\u964d\u4f4e\u78b3\u5316\u7845\u886c\u5e95\u7684\u6210\u672c\uff0c\u6709\u671b\u6709\u529b\u63a8\u52a8\u534a\u5bfc\u4f53\u78b3\u5316\u7845\u4ea7\u4e1a\u7684\u53d1\u5c55\u3002<\/p>\n<p>\u53e6\u5916\uff0c\u76ee\u524d\u7684\u5355\u6676SiC\u886c\u5e95\u4e2d\uff0cN\u578b\u886c\u5e95\u8f83\u591a\uff0cP\u578b\u886c\u5e95\u8fdb\u5c55\u8f83\u6162\u3002P\u578b\u7684SiC\u662f\u5236\u5907\u9ad8\u529f\u7387\u7535\u529b\u7535\u5b50\u5668\u4ef6\u7684\u7406\u60f3\u886c\u5e95,\u4f46\u7535\u963b\u7387\u5f88\u96be\u964d\u4f4e,\u5176P\u578b\u63ba\u6742\u6280\u672f\u4ecd\u5728\u7814\u7a76\u9636\u6bb5\u3002\u7531\u4e8eP\u578b\u63ba\u6742\u7684\u96be\u70b9,\u5982\u53d7\u4e3b\u7535\u79bb\u80fd\u9ad8\u5bfc\u81f4\u886c\u5e95\u7535\u963b\u7387\u9ad8\uff1b\u7f3a\u5c11\u5408\u9002\u7684\u6c14\u4f53\u63ba\u6742\u6e90,\u5bfc\u81f4\u63ba\u6742\u4e0d\u5747\u5300\uff1b\u53d7\u4e3b\u5143\u7d20\u84b8\u6c7d\u538b\u9ad8\u5bfc\u81f4\u6676\u4f53\u4e2d\u4ea7\u751f\u5927\u91cf\u7f3a\u9677\u7b49\u4f7f\u5f97\u751f\u957fP\u578b\u4f53\u5757SiC\u76f8\u5bf9\u56f0\u96be<sup>[48]<\/sup>\u3002<\/p>\n<p>\u6700\u540e\uff0cPVT\u6cd5\u867d\u7136\u76f8\u5bf9\u6210\u672c\u8f83\u4f4e\uff0c\u4f46\u5728\u9ad8\u6e29\u3001\u9ad8\u8017\u80fd\u7684\u5de5\u827a\u6761\u4ef6\u4e0b\uff0c\u4f9d\u7136\u5b58\u5728\u751f\u4ea7\u6210\u672c\u9ad8\u7684\u95ee\u9898\uff0cSiC \u886c\u5e95\u7684\u4ef7\u683c\u4ecd\u8fdc\u8fdc\u9ad8\u4e8eSi\u3001\u84dd\u5b9d\u77f3\u7b49\u886c\u5e95\u3002\u964d\u4f4e\u6210\u672c\u9700\u8981\u66f4\u52a0\u6210\u719f\u7684\u751f\u957f\u548c\u52a0\u5de5\u6280\u672f,\u4e00\u65b9\u9762\u9700\u8981\u63d0\u9ad8\u886c\u5e95\u6750\u6599\u7684\u6210\u54c1\u7387\uff0c\u53e6\u4e00\u65b9\u9762\u5219\u662f\u8981\u901a\u8fc7\u6269\u5f84\u7814\u7a76\u589e\u5927\u9762\u79ef,\u964d\u4f4e\u5355\u4e2a\u5668\u4ef6\u6210\u672c\u3002\u56e0\u6b64\uff0c\u63d0\u9ad8\u6676\u4f53\u751f\u957f\u901f\u7387\u3001\u964d\u4f4e\u751f\u4ea7\u80fd\u8017\u7684\u540c\u65f6\u4fdd\u8bc1\u6676\u4f53\u8d28\u91cf\uff0c\u662f\u672a\u6765\u5de5\u827a\u6539\u8fdb\u7684\u5173\u952e\u65b9\u5411\u3002<\/p>\n<p><strong><b>\u516d\u3001\u603b\u7ed3\u4e0e\u5c55\u671b<\/b><\/strong><\/p>\n<p>SiC \u5668\u4ef6\u56e0\u5176\u5177\u5907\u9ad8\u9891\u9ad8\u6548\u3001\u8010\u9ad8\u538b\u3001\u8010\u9ad8\u6e29\u3001\u6297\u8f90\u5c04\u80fd\u529b\u5f3a\u4ee5\u53ca\u5316\u5b66\u6027\u8d28\u7a33\u5b9a\u7b49\u8bf8\u591a\u4f18\u8d8a\u6027\u80fd\uff0c\u6b63\u88ab\u5e7f\u6cdb\u5e94\u7528\u4e8e\u8f68\u4ea4\u3001\u98ce\u7535\u3001\u5149\u4f0f\u3001\u65b0\u80fd\u6e90\u6c7d\u8f66\u3001\u4e0d\u95f4\u65ad\u7535\u6e90\u7b49\u7535\u529b\u7535\u5b50\u9886\u57df\u4e2d<sup>[49]<\/sup>\u3002\u7269\u7406\u6c14\u76f8\u4f20\u8f93\u6cd5\uff08PVT\uff09\u4f5c\u4e3a\u78b3\u5316\u7845\u5355\u6676\u5236\u5907\u7684\u6838\u5fc3\u6280\u672f\uff0c\u5df2\u7ecf\u5728\u9ad8\u529f\u7387\u7535\u5b50\u5668\u4ef6\u548c\u5149\u7535\u5668\u4ef6\u7684\u6750\u6599\u5236\u5907\u4e2d\u5c55\u73b0\u4e86\u5de8\u5927\u6f5c\u529b\u3002\u901a\u8fc7\u4f18\u5316\u5de5\u827a\u6761\u4ef6\u3001\u63a7\u5236\u6676\u4f53\u7f3a\u9677\u548c\u5e94\u529b\uff0cPVT\u6cd5\u80fd\u591f\u5236\u5907\u51fa\u9ad8\u8d28\u91cf\u76844H-SiC\u548c6H-SiC\u5355\u6676\uff0c\u8fd9\u4e9b\u5355\u6676\u5728\u9ad8\u6e29\u3001\u9ad8\u538b\u3001\u9ad8\u9891\u5668\u4ef6\u4e2d\u7684\u5e94\u7528\u524d\u666f\u5e7f\u9614\u3002\u7136\u800c\uff0c\u968f\u7740\u78b3\u5316\u7845\u5728\u7535\u5b50\u5668\u4ef6\u9886\u57df\u9700\u6c42\u7684\u4e0d\u65ad\u589e\u52a0\uff0c\u5982\u4f55\u8fdb\u4e00\u6b65\u63d0\u5347\u6676\u4f53\u5c3a\u5bf8\u3001\u964d\u4f4e\u6210\u672c\u4ee5\u53ca\u63a7\u5236\u6676\u4f53\u7f3a\u9677\uff0c\u5c06\u662f\u672a\u6765\u7814\u7a76\u7684\u91cd\u70b9\u65b9\u5411\u3002<\/p>\n<p>&nbsp;<\/p>\n<p><strong><b>\u53c2\u8003\u6587\u732e<\/b><\/strong><\/p>\n<p>[1]\u00a0LANGPOKLAKPAM C, LIU A C, CHU K H, et al. Review of silicon carbide processing for power MOSFET[J]. Crystals, 2022, 12(2):245.<\/p>\n<p>[2]\u00a0VERMA J, PAN&#8217;T S, KUMAR A, et al. Analysis of trench termination in 4H-nsic based power devices[J]. Materials Today: Proceedings,2021\uff0c46:11072-11076.<\/p>\n<p>[3]\u00a0IANNACCONE G, SBRANA C, MORELLI I, et al. Power electronic based on wide\u00a0-bandgap semiconductors: opportunities and\u00a0challenges[J].IEEE Access,2021,9:\u00a0139446-\u00a0139456\u00a0.<\/p>\n<p>[4]\u00a0SINGH S, CHAUDHARY&#8217;T, KHANNA G. Recent advancements in wide band semiconductors(Sic and GaN) technology for future devices[J]Silicon,2022,14(11):5793-5800.<\/p>\n<p>[5]\u00a0\u6768\u5149.\u534a\u5bfc\u4f53\u78b3\u5316\u7845\u4e2d\u4f4d\u9519\u7684\u8bc6\u522b\u53ca\u5176\u5728\u5355\u6676\u751f\u957f\u8fc7\u7a0b\u4e2d\u7684\u6f14\u53d8[D].\u6d59\u6c5f\u7406\u5de5\u5927\u5b66,2023.DOI:10.27786\/d.cnki.gzjlg.2023.000790.<\/p>\n<p>[6]\u77f3\u680b.\u8d85\u58f0\u8f85\u52a9\u5355\u6676SiC\u6676\u7247\u7684\u7814\u78e8\u4e0e\u5316\u5b66\u673a\u68b0\u629b\u5149\u7814\u7a76[D].\u5409\u6797\u5927\u5b66,2019.DOI:10.27162\/d.cnki.gjlin.2019.000126.<\/p>\n<p>[7]\u00a0D. Nakamura, et al.\u00a0Growth of High-Quality SiC Single Crystals by PVT Method[J]. \u00a0<em><i>Journal of Crystal Growth<\/i><\/em>, 2018.<\/p>\n<p>[8] K. Nishino, et al.\u00a0Defect Control in SiC Crystals Grown by Physical Vapor Transport\u00a0[J].\u00a0<em><i>Materials Science Forum<\/i><\/em>, 2020.<\/p>\n<p>[9] CHENG L, PALMOUR J W, AGARWAL A K, et al. Strategic overview of high-voltage SiC power device development aiming at global energy savings[J].Materials Science Forum, 2014, 778: 1089.<\/p>\n<p>[10]\u00a0LANG G Q, QIAN H, SU YL, e al. Review of solution growth techniques for 4H-sic single crystal\u00a0[J]. china Foundry, 2023 , 20(2) : 159.178.<\/p>\n<p>[11] MORVAN E, KERLAIN A, DUA C, et al. Influence of material properties on wide\u00a0bandgap microwave power device characteristics[J]. Materials Science Forum, 2003, 433: 731.<\/p>\n<p>[12] LIU Y L. Recent progress on single-crystal growth and epitaxial growth of 4H silicon carbide[J]. Solid State Phenomena, 2022, 332: 73-84.<\/p>\n<p>[13] \u987e\u9e4f,\u96f7\u6c9b,\u53f6\u5e05,\u7b49.\u9876\u90e8\u7c7d\u6676\u6eb6\u6db2\u6cd5\u751f\u957f\u78b3\u5316\u7845\u5355\u6676\u53ca\u5176\u5173\u952e\u95ee\u9898\u7814\u7a76\u8fdb\u5c55[J].\u4eba\u5de5\u6676\u4f53\u5b66\u62a5,2024,53(05):741-759.DOI:10.16553\/j.cnki.issn1000-985x.20240320.007.<\/p>\n<p>[14] L. Neudeck, et al., &#8220;Advances in SiC PVT Crystal Growth for High-Power Device Applications,&#8221;\u00a0<em><i>Journal of Electronic Materials<\/i><\/em>, 2022.<\/p>\n<p>[15]\u674e\u9e4f\u7a0b.\u5927\u5c3a\u5bf8\u78b3\u5316\u7845\u5355\u6676\u751f\u957f\u8bbe\u5907\u53ca\u6e29\u63a7\u65b9\u6cd5\u7814\u7a76[D].\u5c71\u4e1c\u5927\u5b66,2022.DOI:10.27272\/d.cnki.gshdu.2022.005629.<\/p>\n<p>[16]\u00a0Kimoto T. Bulk and epitaxial growth of silicon carbide [J]. Progress in Crystal Growth and Characterization of Materials, 2016, 62(2): 329-51.<\/p>\n<p>[17]\u00a0Wellmann P J. Power Electronic Semiconductor Materials for Automotive and Energy Saving Applications &#8211; SiC, GaN, Ga2O3, and Diamond [J]. Z Anorg Allg Chem, 2017, 643(21): 1312-22.<\/p>\n<p>[18] \u9a6c\u539f\u539f,\u5218\u519b,\u5f20\u96c5\u4e3d,\u7b49.\u5927\u76f4\u5f84SiC\u5355\u6676\u6750\u6599\u7684\u5e94\u7528\u53ca\u524d\u666f\u5206\u6790[J].\u5c71\u4e1c\u5316\u5de5,2021,50(14):177-178.DOI:10.19319\/j.cnki.issn.1008-021x.2021.14.072.<\/p>\n<p>[19] \u674e\u9e4f\u7a0b,\u51af\u663e\u82f1,\u674e\u6c9b\u521a,\u7b49.\u5927\u5c3a\u5bf8\u78b3\u5316\u7845\u5355\u6676\u751f\u957f\u73af\u5883\u7814\u7a76[J].\u534a\u5bfc\u4f53\u5149\u7535,2021,42(05):672-677.DOI:10.16818\/j.issn1001-5868.2021071201.<\/p>\n<p>[20] \u9648\u5f66\u5b87.PVT\u6cd5\u78b3\u5316\u7845\u5355\u6676\u751f\u957f\u7089\u7684\u70ed\u573a\u4eff\u771f\u4e0e\u4f18\u5316\u7814\u7a76[D].\u54c8\u5c14\u6ee8\u5de5\u4e1a\u5927\u5b66,2022.DOI:10.27061\/d.cnki.ghgdu.2022.004085.<\/p>\n<p>[21] \u9773\u4e3d\u5ca9,\u738b\u6bc5,\u738b\u5b8f\u6770,\u7b49.\u57fa\u4e8e8\u82f1\u5bf8\u7684\u78b3\u5316\u7845\u5355\u6676\u751f\u957f\u7089\u6280\u672f[J].\u7535\u5b50\u5de5\u827a\u6280\u672f,2024,45(03):46-49+62.DOI:10.14176\/j.issn.1001-3474.2024.03.012.<\/p>\n<p>[22] \u5f20\u5bb6\u946b,\u5f6d\u71d5,\u9648\u79c0\u82b3,\u7b49.\u78b3\u5316\u7845\u5355\u6676\u4f4d\u9519\u7814\u7a76\u8fdb\u5c55[J].\u4eba\u5de5\u6676\u4f53\u5b66\u62a5, 2022, 51(11): 1973-1982. DOI:10.16553\/j.cnki.issn1000-985x.2022.11.014.<\/p>\n<p>[23]\u90ed\u91d1\u7b1b.\u78b3\u5316\u7845\u57fa\u534a\u5bfc\u4f53\u6750\u6599\u786c\u5ea6\u53ca\u70ed\u5bfc\u7387\u7814\u7a76[D].\u5c71\u4e1c\u5927\u5b66,2021. DOI:10.27272\/d.cnki.gshdu.2021.000886.<\/p>\n<p>[24] YANG YING, LIN TAO, CHEN ZHIMING. Effect of growth gas flow rate on the defects of SiC single crystal[J]. Chinese Journal of Semiconductors,2008,29(5):851-854.<\/p>\n<p>[25] \u9648\u4e4b\u6218\uff0c\u65bd\u5c14\u754f\uff0c\u8096\u5175\uff0c\u7b49\uff0e\u539f\u6599\u5bf9\u78b3\u5316\u7845\u5355\u6676\u751f\u957f\u7684\u5f71\u54cd[J]\uff0e\u65e0\u673a\u6750\u6599\u5b66\u62a5\uff0c2003\uff0c18(4) : 737-743\uff0e<\/p>\n<p>[26] SHIN D G\uff0cSON H R, HEO S, et al. Impurity behavior of high purity SiC powder during SiC crystal growth[J]\uff0eMaterials Science Forum, 2014, 778 \/779 \/780: 22-25\uff0e<\/p>\n<p>[27] \u738b\u6bbf,\u90ed\u7acb\u6885,\u738b\u98de\u9f99,\u7b49.\u9ad8\u7eaf\u5ea6\u78b3\u5316\u7845\u5355\u6676\u7c89\u6599\u5408\u6210\u5de5\u827a[J].\u7535\u5b50\u5de5\u827a\u6280\u672f,2024,45(01):46-50.DOI:10.14176\/j.issn.1001-3474.2024.01.013.<\/p>\n<p>[28] \u80e1\u667a\u81e3.\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53SiC\u5355\u6676\u751f\u957f\u7528\u9ad8\u7eafSiC\u7c89\u5236\u5907\u7814\u7a76[D].\u5357\u660c\u5927\u5b66,2023.DOI:10.27232\/d.cnki.gnchu.2023.003583.<\/p>\n<p>[29] \u9ad8 \u6500\uff0c\u5218 \u7199\uff0c\u4e25\u6210\u950b\uff0c\u7b49\uff0e\u7528\u4e8eSiC\u6676\u4f53\u751f\u957f\u7684\u9ad8\u7eaf\u539f\u6599\u7684\u5408\u6210\u53ca\u6027\u80fd\u7814\u7a76\uff3bJ\uff3d\uff0e\u4eba\u5de5\u6676\u4f53\u5b66\u62a5\uff0c2013\uff0c42(5) :819-823\uff0e<\/p>\n<p>[30] \u674e \u658c\uff0c\u9a6c\u5eb7\u592b\uff0c\u738b\u82f1\u6c11\uff0c\u7b49\uff0e\u9ad8\u771f\u7a7a\u4e0b\u5408\u6210\u751f\u957f\u5355\u6676\u7528\u9ad8\u7eaf\u78b3\u5316\u7845\u7c89\u6599\uff3bJ\uff3d\uff0e\u7535\u5b50\u5de5\u827a\u6280\u672f\uff0c2017\uff0c38(3) :164-167<\/p>\n<p>[31] \u9a6c\u5eb7\u592b\uff0c\u738b\u82f1\u6c11\uff0c\u674e \u658c\uff0c\u7b49\uff0e\u901aH2\u5408\u6210\u751f\u957f\u5355\u6676\u7528\u9ad8\u7eaf\u78b3\u5316\u7845\u7c89\u6599\uff3bJ\uff3d\uff0e\u7535\u5b50\u5de5\u827a\u6280\u672f\uff0c2016\uff0c37(4) :187-190\uff0e<\/p>\n<p>[32] \u718a\u5e0c\u5e0c,\u6768\u7965\u9f99,\u9648\u79c0\u82b3,\u7b49.\u4f4e\u4f4d\u9519\u5bc6\u5ea68\u82f1\u5bf8\u5bfc\u7535\u578b\u78b3\u5316\u7845\u5355\u6676\u886c\u5e95\u5236\u5907[J].\u65e0\u673a\u6750\u6599\u5b66\u62a5,2023,38(11):1371-1372.<\/p>\n<p>[33]\u00a0\u6768\u5149.\u534a\u5bfc\u4f53\u78b3\u5316\u7845\u4e2d\u4f4d\u9519\u7684\u8bc6\u522b\u53ca\u5176\u5728\u5355\u6676\u751f\u957f\u8fc7\u7a0b\u4e2d\u7684\u6f14\u53d8[D].\u6d59\u6c5f\u7406\u5de5\u5927\u5b66,2023.DOI:10.27786\/d.cnki.gzjlg.2023.000790.<\/p>\n<p>[34] \u4e01\u7965,\u94b1\u660a,\u6881\u521a\u5f3a,\u7b49.\u9ad8\u6e29\u6eb6\u6db2\u6cd5\u751f\u957f4H\u2013SiC\u5355\u6676\u7684\u52a9\u6eb6\u5242\u7814\u7a76\u8fdb\u5c55[J].\u7845\u9178\u76d0\u5b66\u62a5,2024,52(07):2425-2441.DOI:10.14062\/j.issn.0454-5648.20240139.<\/p>\n<p>[35]\u738b\u6c9b\u5fd7.\u5355\u6676\u78b3\u5316\u7845\u7684\u91d1\u521a\u77f3\u7ebf\u952f\u5207\u7247\u8868\u5c42\u88c2\u7eb9\u635f\u4f24\u7814\u7a76[D].\u5c71\u4e1c\u5927\u5b66,2020.DOI:10.27272\/d.cnki.gshdu.2020.000072.<\/p>\n<p>[36]\u9093\u62db\u9e4f.\u5355\u6676SiC\u8d85\u58f0\u8f85\u52a9\u5212\u64e6\u548c\u78e8\u524a\u7279\u6027\u7814\u7a76[D].\u534e\u4fa8\u5927\u5b66,2022.DOI:10.27155\/d.cnki.ghqiu.2022.000556.<\/p>\n<p>[37] DUDLEY M, HUANG X R, HUANG W, et al. The mechanism of micropipe nucleation at inclusions in silicon carbide[J]. Applied Physics\u00a0Letters, 1999, 75(6): 784-786.<\/p>\n<p>[38] KATSUNO T, WATANABE Y, FUJIWARA H, et al. Analysis of surface morphology at leakage current sources of 4H-SiC Schottky barrier diodes[J]. Applied Physics Letters, 2011, 98(22): 222111.<\/p>\n<p>[39] YAMAMOTO K, NAGAYA M, WATANABE H, et al. Influence of threading dislocations on lifetime of gate thermal oxide[J]. Materials Science Forum, 2012, 717 \/ 718 \/ 719 \/ 720: 477-480.<\/p>\n<p>[40] KIMOTO T. Material science and device physics in SiC technology for high-voltage power devices[ J]. Japanese Journal of Applied Physics,2015, 54(4): 040103.<\/p>\n<p>[41] YANG G, LIU X S, LI J J. et al. Dislocations in 4H silicon carbide single crystals[J]. Journal of Synthetic Crystals, 2022, 51(9): 1673.<\/p>\n<p>[42]\u9093\u4e9a,\u5f20\u5b87\u6c11,\u5468\u7389\u950b.X\u5c04\u7ebf\u884d\u5c04\u6cd5\u6d4b\u91cf\u78b3\u5316\u7845\u5355\u6676\u7684\u6b8b\u4f59\u5e94\u529b[J].\u529b\u5b66\u5b66\u62a5,2022,54(01):147-153.<\/p>\n<p>[43]\u00a0XIE X J, HU X B, CHEN X F, et al. Characterization of the three-dimensional residual stress distribution in SiC bulk crystals by neutron\u00a0diffraction[J]. CrystEngComm, 2017, 19(43): 6527-6532.<\/p>\n<p>[44]MAKAROV Y N, LITVIN D, VASILIEV A, et al. Sublimation growth of 4 and 6 inch 4H-SiC low defect bulk crystals in Ta (TaC) crucibles[J]. Materials Science Forum, 2016, 858: 101.<\/p>\n<p>[45] CHOI J W, KIM J G, JANG B K, et al. Modified hot-zone design for large diameter 4H-SiC single crystal growth[J]. Materials Science Forum, 2019, 963: 18.<\/p>\n<p>[46] PENG Y, CHEN X F, PENG J, et al. Study on the growth of high quality semi-insulating \u03d5150 mm 4H-SiC single crystal[J]. Journal of Synthetic Crystals, 2016, 45(5): 1145.<\/p>\n<p>[47] \u7f16\u8f91\u90e8.\u6d59\u6c5f\u5927\u5b6650 mm\u539a6\u82f1\u5bf8\u78b3\u5316\u7845\u5355\u6676\u751f\u957f\u83b7\u5f97\u6210\u529f[J].\u7c89\u672b\u51b6\u91d1\u5de5\u4e1a,2022,32(05):141.<\/p>\n<p>[48]\u5f6d\u71d5,\u9648\u79c0\u82b3,\u8c22\u96ea\u5065,\u7b49.\u534a\u7edd\u7f18\u78b3\u5316\u7845\u5355\u6676\u886c\u5e95\u7684\u7814\u7a76\u8fdb\u5c55[J].\u4eba\u5de5\u6676\u4f53\u5b66\u62a5,2021,50(04):619-628.DOI:10.16553\/j.cnki.issn1000-985x.2021.04.005.<\/p>\n<p>[49]\u9ea6\u7389\u51b0,\u8c22\u6b23\u8363.\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u78b3\u5316\u7845(SiC)\u7814\u7a76\u8fdb\u5c55[J].\u5e7f\u4e1c\u5316\u5de5,2021,48(09):151-152+155.<\/p>\n<p>&nbsp;<\/p>","protected":false},"excerpt":{"rendered":"<p>\u59d3\u540d\uff1a\u5b59\u5609\u7426 &nbsp; \u6458 \u00a0\u8981\uff1a\u78b3\u5316\u7845\uff08SiC\uff09\u5668\u4ef6\u56e0\u5177\u5907\u9ad8\u9891\u9ad8\u6548\u3001\u8010\u9ad8\u538b\u9ad8\u6e29\u3001\u6297\u8f90\u5c04\u80fd\u529b\u5f3a\u4ee5\u53ca\u5316\u5b66\u6027\u8d28 [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[12],"tags":[],"class_list":["post-7568","post","type-post","status-publish","format-standard","hentry","category-industry"],"_links":{"self":[{"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=\/wp\/v2\/posts\/7568","targetHints":{"allow":["GET"]}}],"collection":[{"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=\/wp\/v2\/posts"}],"about":[{"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcomments&post=7568"}],"version-history":[{"count":6,"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=\/wp\/v2\/posts\/7568\/revisions"}],"predecessor-version":[{"id":7578,"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=\/wp\/v2\/posts\/7568\/revisions\/7578"}],"wp:attachment":[{"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fmedia&parent=7568"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=%2Fwp%2Fv2%2Fcategories&post=7568"},{"taxonomy":"post_tag","embeddable":true,"href":"http:\/\/www.surfacility.cn\/index.php?rest_route=%2Fwp%2Fv2%2Ftags&post=7568"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}