-Tianyi T series arc ion coating machine

一、Technical principles

Generate high-density electron flow through arc discharge in a vacuum state; Under the action of magnetic and electric fields, the transport process of electron flow is precisely controlled, and high-density ion flow is generated by collision with the reaction gas; Under the control of electromagnetic fields, ion or electron currents can bombard the surface of samples with different energies, achieving etching and cleaning of samples, activation of surfaces, ion nitriding, physical vapor deposition, etc. The entire preparation process is a typical physical process, without the use of any chemical reagents, and without the emission of any toxic or harmful products.

二、Basic composition of equipment

Vacuum system+power system+core components+control system

三、Equipment Technical Parameters

1. Total technical parameters:

2.Technological innovation points

(1) The plasma uniformity is significantly improved, making it an ideal coating system for tools and scientific research fields;

(2) By using a 160 magnetron arc source, the water cooling structure has been improved, and a filtering arc structure can be optionally selected, significantly reducing the number and size of large particles and improving the quality of the film;

(3) Provide a hardware platform for plasma optimizer, offering support for various coating processes such as CrN based, TiN based, AlO based, etc;

(4) There are high, medium, and low device platforms to choose from.

3.progressiveness

(1) Magnetic and electric field structures can be customized;

(2) Improve water cooling structure and heat transfer efficiency;

(3) Improve the connection structure and reliability;

(4) Capable of preparing customized coatings for industries such as nuclear, aerospace, and medical devices.

四、Physical picture of vacuum coating