New water-cooled arc source

The new water-cooled cathode uses copper foil with better thermal conductivity, greatly enhancing the convective heat transfer efficiency between the target material and the water-cooled liquid, and the temperature in various areas of the target surface decreases significantly.

Advantages of the new water-cooled cathode

The new water-cooled cathode thermal conductive sheet has been replaced with copper foil with better thermal conductivity and ductility, reducing the distance between the target material bottom and the water cooling liquid from 0.5mm to 0.2mm, greatly enhancing the convective heat transfer efficiency between the target material and the water cooling liquid. At the same time as the significant decrease in target surface temperature, the uniformity index of target surface temperature also increased from 0.975 to 0.978. The significant increase in temperature of copper foil thermal conductive sheets, water cooling liquids, etc. also indicates that the new water-cooled cathode can more effectively carry away the accumulated heat on the target surface under process conditions, thereby providing stronger assistance for the increasingly stringent process indicators today.

(a) Stainless steel sheet

(b) Water cooled copper foil

Temperature cloud map of water-cooled cathode