How to make vacuum coating samples quickly and efficiently

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How to make vacuum coating samples quickly and efficiently

Date:2025-07-21

To achieve fast and efficient vacuum coating and sampling, optimization is required from multiple aspects such as equipment, process, materials, and management. Here are some key strategies:

1. Pre preparation optimization

  • Clarify requirements

    • Confirm key parameters such as substrate type, film layer material, thickness, and uniformity to avoid repeated adjustments.

    • Provide clear sample drawings or technical specifications to reduce communication costs.

  • Material pretreatment

    • Complete substrate cleaning in advance (such as ultrasonic cleaning, plasma cleaning) to avoid temporary treatment before coating.

    • Prepare the membrane materials (target material, evaporation source) in advance to ensure purity and size match the equipment requirements.


2. Equipment and process optimization

  • Choose the appropriate coating technology

    • Small area/simple film layer: using thermal evaporation (resistance evaporation or electron beam evaporation), fast speed and low cost.

    • Complex/high-precision film layer: using magnetron sputtering or ion plating, although the equipment cost is high, the film quality is good, reducing rework.

  • Rapid target switching design

    • Using modular target material supports to shorten material replacement time.

    • Multi target devices can be pre installed with different materials simultaneously, reducing the number of cavity openings.

  • Pre validation of process parameters

    • Use simulation software (such as COMSOL) to simulate the coating process and optimize parameters (power, air pressure, temperature) in advance.

    • Establish a historical process database and directly call mature parameters for similar requirements.

  • Rapid Vacuum Extraction Technology

    • Choose a combination of dry pump and molecular pump to reduce oil pollution and accelerate vacuum pumping.

    • The cavity design is compact, reducing dead volume, or using a load lock to avoid frequent deflation of the main cavity.


3. Automation and Intelligence

  • Automated control

    • Using PLC or computer to control the coating process, automatically adjusting power, gas flow rate, etc., to reduce human error.

    • Integrated film thickness monitoring (such as quartz crystal oscillator, optical monitoring), real-time feedback adjustment of plating speed.

  • Quick sample fixture

    • Design universal or quick clamping fixtures that support simultaneous coating of multiple samples (such as rotating planetary carriers).

    • Use 3D printing custom fixtures for irregular substrates to shorten the adaptation time.


4. process management

  • Parallel Jobs

    • Simultaneously prepare the next batch of samples or analyze the plated samples while vacuuming or coating the equipment.

    • Establish standard operating procedures (SOP) to reduce human operation delays.

  • Quick detection and feedback

    • Equipped with in-situ testing (such as ellipsometer, spectrometer), evaluate performance immediately after coating.

    • If it is not qualified, priority should be given to adjusting key parameters (such as power, time) rather than a comprehensive retry.


5. Other Skills

  • Small batch trial plating

    • First, plate 1-2 samples to verify the parameters, and then expand the batch after confirmation.

  • Collaboration and Outsourcing

    • If the self-developed cycle is long, a professional coating factory can be commissioned (they have a rich process library and fast sampling services).


Example process (electron beam evaporation sampling)

  1. Day 1:Confirm requirements → substrate cleaning → target material installation.

  2. Day 2:Vacuum extraction (2 hours) → Pre melting target material (degassing) → Coating (30 minutes) → In situ testing.

  3. If qualified: batch coating; If adjusted: only modify the coating time/power, retry the next day.


By using the above methods, the traditional sampling cycle (1-2 weeks) can be shortened to 3-5 days, while improving the success rate. The core is to reduce non coating time (such as vacuuming and target changing), optimize process stability, and utilize automation tools.

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